Yuav Ua Li Cas Tseem Ceeb Yog Gas Purity hauv Semiconductor Manufacturing?
Kev pom zoo dav dav hauv Semiconductor Manufacturing
Ib qho zoo -tsim kev pom zoo yeej muaj nyob rau hauv kev tsim khoom semiconductor: qhov txwv siab tshaj ntawm kev ua haujlwm nti yog txhais los ntawm kev tsim, thaum qhov qis qis ntawm cov khoom lag luam tawm los ntawm cov khoom siv purity.
Cov duab yog los ntawm internet.
Tag Nrho Cov Ntawv Sau Npe Tom Qab Ib Chip
Los ntawm wafer ntxuav thiab nyias- zaj duab xis deposition mus rau etching thiab doping, cov txheej txheem ntau lawm rau ib 12-inch wafer muaj ntau tshaj 30 hom txheej txheem gases, xws li silane, ammonia, nitrogen trifluoride, tungsten hexafluoride, hydrogen chloride, thiab ntau dua. Txhua cov pa roj yuav tsum raug xa mus rau cov tshuaj tiv thaiv chamber ntawm ultra-high purity.
Cov kab tsis huv ntawm qib ppb (moisture, oxygen, cov teeb meem) nkag mus rau hauv cov kav dej tuaj yeem ua rau nyias nyias -film defects thiab interfacial contamination, ncaj qha dragging down ntau lawm yield. Noj cov txheej txheem 3nm ua piv txwv, txhua tus neeg nti yog tsim nyog ntau pua ntawm US las; tsuas yog 1% kev hloov pauv hauv cov txiaj ntsig tau txaus los tshem tawm cov txiaj ntsig muaj nqis ntawm kaum lab lab.
Vim li cas "High Purity" tsis txaus?
Hauv kev lag luam semiconductor, "siab purity" tsis sib npaug rau "txheej txheem-npaj". Qhov kev sib tw tiag tiag yog nyob rau hauv purity retention - tswj kev sib kis- roj dawb thoob plaws tag nrho txoj kev xa tawm los ntawm qhov chaw siv roj mus rau qhov chaw siv (POU).
Peb qhov kev tiv thaiv tseem ceeb ua haujlwm hauv tandem kom ua tiav qhov no:
(1) Kev xaiv khoom: Tubing thiab valve lub cev yog tsim los ntawm VIM + VAR ob chav remelted 316L stainless hlau kom txo qis cov ntsiab lus tawm ntawm cov ntaub ntawv hauv paus.
(2) Nto tiav: Internal nto roughness Ra Tsawg dua los yog sib npaug rau 0.25 μm (10 μin.) nrog electropolishing (EP) kev kho kom txo tau cov adhesion thiab ya raws adsorption.
(3) Hermetic sealing kev ncaj ncees: Helium leak rate Tsawg dua lossis sib npaug li 1 × 10⁻⁹ atm·cc/sec los thaiv cov kab mob sab nraud nkag tag nrho.
Semiconductor Gas Delivery Solutions
VIGOR VUPS Ultra-High Purity khoom kab npog tag nrho cov roj xa khoom xa tuaj raws li SEMI cov qauv, suav nrog VCR hlau lub ntsej muag- foob fittings, siab- purity diaphragm li qub thiab ob -theem siab regulators.
Tag nrho cov khoom tau sib sau ua ke, sim thiab muab ob npaug rau- lub hnab nqus tsev vacuum- tau ntim rau hauv Chav Kawm 100 chav huv ua ntej xa khoom. Cov neeg siv khoom tau txais dab tsi tsis yog ib tus neeg li qub xwb, tab sis ua tiav cov ntsaws ruaj ruaj- thiab - ua si ultra- siab purity assurance system.
VIGOR cov khoom lag luam tau ua haujlwm tau zoo hauv cov tshuab xa hluav taws xob tshwj xeeb thiab CVD / PVD cov kav xa hluav taws xob ntawm ntau lub wafer fabs, sib xws nrog cov txheej txheem tseem ceeb xws li silane, nitrogen trifluoride thiab boron trichloride.
Kev tsim khoom semiconductor yog ib qho kev sib tw uas tsis muaj qhov kawg tiv thaiv cov kab mob - thiab VIGOUR lub luag haujlwm yog los xyuas kom meej qhov chaw pib ua kom huv tshaj plaws rau kev sib tw no.
