Flow Hloov VEFS2 Series
Tsav los ntawm kev txawj ntse txawj ntse, siab -kev ua tau zoo suav (HPC), automotive electronics, thiab Internet of Things applications, kev lag luam semiconductor tab tom hloov pauv sai. Qhov kev loj hlob zoo kawg li no, txawm li cas los xij, kuj tau nthuav tawm cov kev sib tw ua haujlwm tshiab. Raws li cov nplai ntau lawm nthuav dav ntawm tus nqi tsis tau muaj dua, cov roj tshwj xeeb tshwj xeeb xws li silane thiab phosphine tau siv dav hauv cov khoom siv hluav taws xob semiconductor. Txhua yam kev tswj tsis tau cov pa tawm los ntawm cov raj xa dej tsis sib haum, cov khoom siv xoob xoob, kev foob tsis ua haujlwm, lossis kev teeb tsa tsis raug tuaj yeem ua rau muaj kev nyab xeeb loj heev, ua rau muaj kev hem thawj rau cov neeg ua haujlwm kev nyab xeeb, ua rau cov khoom siv tseem ceeb ua rau poob qis, thiab ua rau cov nqi tsis tau npaj tseg. Tawm tsam keeb kwm yav dhau los no, VIGOUR's Excess Flow Switch (EFS), nrog rau nws cov kev tsim kho tshuab ua kom huv thiab tshwj xeeb ultra- siab-purity (UHP) kev sib raug zoo, tau dhau los ua kev ruaj ntseg tsis tseem ceeb rau cov khoom siv roj tshwj xeeb, suav nrog Gas Txee thiab VMBs, hauv semiconductor manufacturing kab thoob ntiaj teb.
Lub hauv paus ntsiab lus tsim qauv ntawm VIGOR EFS yog txhawm rau txheeb xyuas cov xwm txheej txawv txav thiab teb tau zoo. Thaum ib qho kev poob qis hauv cov kav dej tsis ua haujlwm ua rau muaj qhov tshwm sim sai thiab ntau dhau uas dhau qhov ua ntej - teeb tsa qhov chaw tseem ceeb, lub cuab yeej tam sim ntawd ua rau lub teeb liab teb. Cov teeb liab no kis tau los ntawm kev qhib lossis kaw ntawm cov hluav taws xob tiv tauj hauv kev tsim - hauv reed hloov, uas yog synchronized thiab xa mus rau SCADA system lossis Gas Monitoring System (GMS). Los ntawm kev muab lub sijhawm ceeb toom tiag tiag - thiab ua kom cov lus teb ceev ceev, nws txhawb kev tswj hwm kev nyab xeeb, txo cov kev phom sij zoo, thiab ntxiv dag zog rau tag nrho cov kev ntseeg siab ntawm cov roj xa hluav taws xob network.
Hauv cov txheej txheem tsim khoom semiconductor, txhua yam khoom siv hauv cov pa roj tuaj yeem dhau los ua qhov muaj peev xwm ntawm kev sib kis. Txawm hais tias me me, hlau impurities, los yog nto adsorption tuaj yeem cuam tshuam wafer zoo thiab txo cov yields. Yog li ntawd, VIGOR nruj me ntsis ua raws li cov qauv nruj ntawm kev lag luam semiconductor kom paub meej cov khoom purity, deg huv si, thiab kev ua haujlwm ruaj khov.
Hais txog cov qauv khoom, VIGOR tsuas yog siv 316L stainless hlau uas ua los ntawm VIM/VAR ob npaug- cov tshuab yaj. Cov txheej txheem metallurgical siab heev no txo qis cov hlau sib xyaw thiab cov khoom seem seem, kom ntseeg tau zoo corrosion kuj thiab txo qhov kev pheej hmoo ntawm cov pa paug. Rau kev kho saum npoo, tag nrho cov khoom tau dhau los ua cov khoom siv electropolishing (EP), tswj qhov roughness sab hauv ntawm 5-10 μin. Xws li ib tug du, huv si sab hauv tiv thaiv cov roj molecules los ntawm adsorbing mus rau sab hauv phab ntsa thiab tshem tawm particle los nag, txhawb kev ruaj khov thiab kis kab mob - pub dawb.
Tsis tas li ntawd, VIGOR EFS muaj ntau txoj kev xaiv ntawm cov ntsiab lus tseem ceeb ntawm kev mus ncig thiab cov kev xaiv hloov tau yooj yim kom haum rau ntau yam kev thov. Los ntawm qhov yooj yim parameter sib piv, cov neeg siv tuaj yeem txiav txim siab tus qauv raug raws li cov hom roj tshwj xeeb, kev ua haujlwm siab, thiab qhov siab tshaj plaws tso cai. Qhov kev hloov kho siab no ua kom meej meej thiab txhim khu kev qha tshaj - ntws tiv thaiv rau ntau yam ultra- siab- purity gas applications hauv niaj hnub semiconductor fabrication.
Flow Hloov VEFS2 Series
Khoom Feature
Flow switch rau high flow applications
Muaj nrog kab rov tav lossis ntsug kab loj
Tsawg kawg siab poob los ntawm lub cuab yeej
SS 316L stainless hlau
Technical Data
| Parameter | Specification |
|---|---|
| Qhov Chaw Siab | Nqus mus rau 3500 psig (241 bar) - 1/2 "Nqus mus rau 3000 psig (207 bar) - 3/4" Nqus mus rau 2200 psig (152 bar) - 1 " |
| Flow Trip Reference Points | Saib cov ntaub ntawv xaj |
| Qhov tseeb | ±20% |
| Ua haujlwm kub | -10 ~ 175 ° F (-23 ~ 80 ° F) |
| Khoom siv lub cev | SWB 316L |
| Inlet / Qhov hluav taws xob sib txuas | 1/2 ", 3/4" tube weld / VFS haum 1" raj vuam |
| Sab nraud Leakage Rate | <1×10⁻⁹ mbar·l/s He |
| Reed Hloov Hom | SPDT, 3 xaim / 2 txoj haujlwm |
| Kev ntsuas fais fab | 30VDC / 3W max |
| Hloov tam sim no | 0.2A max |
| Nqa Tam Sim No | 0.5A max |
| Initial Contact Resistance | 0.1Ohm max |
| Cable Ntev | 3m |
| Hlau Gauge | 24 AWG |
Ordering Information
