INTEGRATED GAS SYSTEM>>IGS Khoom Series Sib Koom

Dec 25, 2025

Tso lus

INTEGRATED GAS SYSTEM>>IGS Khoom Series Sib Koom

 

 

VIGOR muab cov txheej txheem kev sib xyaw ua ke siab tshaj plaws (IGS) tsim tshwj xeeb rau siab - tswj cov roj purity hauv kev lag luam semiconductor. Peb cov kev daws teeb meem sib xyaw ua haujlwm tshiab nrog cov qauv tsim khoom nruj kom ntseeg tau tias muaj kev ntseeg siab, kev cog lus, thiab kev ua tau zoo tshaj plaws hauv cov ntawv thov tseem ceeb.

 

Integrated Gas Systems (IGS)

Khoom nta

  • Siv rau kev tswj roj hauv kev lag luam semiconductor
  • Modular tsim
  • Tag nrho cov khoom yog nto mounted raws li SEMl tus qauv
  • Qhov loj me yog li 1/3 lub vaj huam sib luag
  • SEMl cov khoom siv, cov txheej txheem electropolishing thiab orbital vuam
  • Wseal thiab C-seal yeem
  • Muab ob lub hnab ntim rau hauv chav huv
  • Tag nrho cov khoom, tshwj tsis yog "bracets", yog tag nrho cov tsim raws li VS001A txheej txheem specification

 

IGS Siab Regulators VIR Series

1. Max. Ua haujlwm siab: 150 psig

2. Max. Ua haujlwm kub: -40 ° F ~ 140 ° F (-40 ° ~ 60 ° C)

3. Qhov hluav taws xob siab: 0 ~ 100 psig

4. Qhov chaw tiav: Max. 5uin. Ra

5. Khoom siv: 316L VIM-VAR

6. Valve Rooj: PCTFE (PFA / Vespel yeem)

7. Flow Capacity: Cv=0.08

 

IGS Pressure Regulators (VIR Series)

IGS Diaphragm Valves VID Series

1. Max. Ua haujlwm siab: 150 psig

2. Max. Ua haujlwm kub: PCTFE 14℃F ~ 176℃F (-10℃~ 80 degree); PFA 14 ° F ~ 302 ° F (-10 ° C ~ 150 ° C)
3. Tsis muaj qhov kawg tsim
4. Qhov chaw ntub dej yog kho nrog EP, Max. 5uin. Ra.

5. Khoom siv: 316L VIM-VAR
6. 100% Helium- leak- kuaj

7. Flow Capacity: Cv=0.1

 

 

IGS Diaphragm Valves VID Series

IGS Flow Control Valves VIM Series

1. Max. Ua haujlwm siab: 150 psig

2. Max. Ua haujlwm kub: 14 ° F ~ 302 ° F (-10 ° ~ 150 ° C)

3. Sealing: FKM

4. Qhov chaw ntub dej yog kho nrog EP, Max. 5uin. Ra

5. Flow Capacity: Cv=0.03

 

 

IGS Flow Control Valves VIM Series

IGS Kos Valves VICV Series

1. Max. Ua haujlwm siab: 150 psig

2. Max. Ua haujlwm kub: 14 ° F ~ 176 ° F (-10 ° ~ 80 ° C)

3. Suface tiav: Max. 5uin. Ra

4. Cracking siab: 0.33 psig

5. Flow Capacity: Cv=0.2

 

 

IGS Check Valves VICV Series

Substrates VlB Series (C- foob)

1. C- foob
2. Tsis yog- txhim kho kev txhim kho kom ntseeg tau tias cov nyhuv sealing

3. Qhov ntub dej yog kho nrog EP

4. Qhov chaw tiav: Max. 5uin.Ra

5. Khoom siv: 316L VIM-VAR

Substrates VlB Series (C-seal)

 

Core Product Series

  • IGS Siab Regulators (VIR Series)
  • IGS Diaphragm Valves (VID Series)
  • IGS Flow Control Valves (VIM Series)
  • IGS Check Valves (VICV Series)
  • IGS Substrates & Brackets (VIB Series)
  • Gaskets (VIG Series)
Gaskets (VIG Series)

 

Vim li cas thiaj xaiv VIGOR IGS?

 

Peb lub tshuab sawv cev rau kev sib koom ua ke ntawm precision engineering thiab kev tsim qauv, xa:

  • Space Efficiency: Ua kom txo cov vaj huam sib luag loj.
  • Ultra-High Purity: Cov ntaub ntawv thiab cov txheej txheem tsim rau cov khoom siv hluav taws xob semiconductor- qib kev siv.
  • Modular Flexibility: Yooj yim rau configure, nthuav, thiab tswj.
  • Kev ntseeg tau pov thawj: Kev sim nruj thiab SEMI- ua raws li tus qauv.

 

Ntawm VIGOUR, peb muab ntau tshaj li cov khoom siv xwb-peb muab cov kev daws teeb meem sib xyaw ua ke uas coj koj cov tswv yim rau lub neej nrog kev ntseeg siab thiab raug.

 

 

Xa kev nug