VIGOUR>>Koj Trusted Partner rau Advanced Gas Delivery Systems
Hauv kev lag luam siab - thev naus laus zis qhov twg qhov tseeb, purity, thiab kev nyab xeeb tsis yog - sib tham tau, kev xa khoom roj txhim khu kev qha yog lub hauv paus. VIGOR tsim thiab tsim cov khoom xa tawm dav dav uas ua tau raws li cov kev xav tau tseem ceeb no, txhawb kev tsim kho tshiab thiab tsim khoom thoob ntiaj teb kev tshawb fawb thiab kev tsim khoom lag luam.
Tshwj xeeb Gas Rack
VGR Series
- Nruam thiab tsis cuam tshuam kev nyab xeeb ntawm hluav taws xob hluav taws xob - cov pa roj ntau ntau.
- Optional venting thiab purging functions, nrog kev nyab xeeb siab nyem.
- Class 100 cleanroom welded los ua ke.
- Kev xaiv PLC tswj nrog kev sib txuas lus sib txuas.
- Kev kub siab / Tsis tshua muaj siab tswb nrog lub suab nrov thiab pom cov teeb liab, muaj peev xwm kaw qhov xwm txheej ceev.
- Touchscreen zaub rau lub tog raj kheej siab thiab lwm yam ntaub ntawv.
- Hom: Tshwj Xeeb Gas Control Rack
- Khoom siv: SS 316L rau li qub thiab cov kav dej
- Cov pa siv tau: inert gases (Ne, Kr, Ar, Nws thiab lwm yam)
- Gas Supply Method: Gas cylinder
- Fais fab mov: 110 ~ 240VAC
- Configurations: Tib-lub tog raj kheej, dual{1}}lub tog raj kheej
Tshwj xeeb Gas txee
VGC Series
- Hom: Tshwj xeeb Gas Txee
- Khoom siv: SS 316L rau li qub thiab cov kav dej
- Cov pa siv tau: Flammable/ self{0}}igniting gases, corrosive gases, toxic gases (eg, SiH4, HCL)
- Fais fab mov: 110 ~ 240V AC
- Enclosure: Corrosion-resistant welded steel
- Iav Qhov rai: Auto-kaw
- Exhaust Pipe: Sab saum toj -mounted tso pa
- Cov khoom siv: University / Research Laboratories; Kev tsim khoom lag luam; Photovoltaic Hnub Ci Zog; Pharmaceuticals thiab Biotechnology; Semiconductor Integrated Circuit Manufacturing
- Cov Qauv Tsim: Ua raws li cov qauv SEMI S2; Ua raws li cov cai thoob ntiaj teb kev ruaj ntseg hluav taws xob; Kev ua haujlwm siab tshaj plaws: 110% ntawm cov ntaub ntawv pov thawj siab
Gas Stick Assemblies
VUB Series
- Ultra high purity gas stick rau tag nrho cov pa xa hluav taws xob
100TG: Tsawg dua lossis sib npaug rau 30 slpm xa 1/4 "VFS
200TG: Tsawg dua lossis sib npaug rau 300 slpm xa 3/8 "VFS
300TG: Tsawg dua lossis sib npaug rau 600 slpm xa 1/2 "VFS
- Cov khoom yog fabricated nyob rau hauv ua raws li VS001A txheej txheem specification
- Kev tswj siab raug
- Tag nrho cov kev sib txuas welded los yog VFS
- Los ntawm txhais tes los yog pneumatic diaphragm valve xaiv
- 100% Helium-kua{2}} kuaj
- Inlet siab P1: 300psig (20bar)
- Qhov hluav taws xob siab P2: Vac rau 30/60/100/150 psig (1/2/4/7/10bar)
- Diaphragm valve cov ntaub ntawv: lub cev 316L; Valve rooj PCTFE; Diaphragm Elgiloy®
- Regulator cov ntaub ntawv: lub cev 316L / 316L thib ob remelt; Valve rooj PCTFE; Diaphragm Hastelloy®
- Leak tus nqi: (rau cua) 1x10^-9 mbar I/s Nws;
(ntawm rooj) 1x10^-8 mbar I/s H
Siab Tswj Vaj Huam Sib Luag
VUP-1U Series
- Pressure Control Vaj Huam Sib Luag (Sib sab hom)
- VSR-100UBS/UCS Series Ib Theem Regulator
- VDV33UBS Series cua diaphragms li qub
- VDV33UBS Series Inlet txheej txheem diaphragm li qub
- Orbital welded VFS- ntsej muag sib txuas
- Modular tsim
- Haum rau inlet siab txog 3500 psig (250bar)
- Ib qho yooj yim installation rau hauv kev nyab xeeb txee rau roj thooj voos kheej kheej
- 100% Helium leak tested
- Inlet siab P1: max.3500psig (250bar)
- Qhov hluav taws xob siab P2: Vac rau 10/30/60/100/150 psig (0.7/2/4/7/10 bar)
- Deg tiav: 10uin. Ra (25uin. Ra yeem)
- Inlets thiab Outlets: 1/4 "VFS Fitting
- Qhov kub thiab txias: -40F txog +160℉ (-40℃degree rau +71 degree)
- Flow peev: Cv=0.09 (Cv=0.15 kev xaiv)
Engineered rau Excellence thiab Safety
Txhua VIGOR Gas Delivery System yog tsim los ntawm kev cog lus rau cov qauv siab tshaj plaws:
- Tsim & Ua raws:Cov khoom ua raws li SEMI S2 thiab thoob ntiaj teb kev tiv thaiv hluav taws, nrog rau kev nyab xeeb xws li kaw thaum muaj xwm ceev -tawm thiab lub tswb nrov ua ke thoob plaws.
- Kev tsim khoom Purity:Kev sib dhos thiab orbital vuam yog ua nyob rau hauv Chav Kawm 100 qhov chaw huv huv, siv cov khoom siv siab - xws li SS 316L thiab Hastelloy® C276 kom ntseeg tau tias kev huv huv thiab siv tau ntev.
- Verified Integrity:Txhua chav ua haujlwm tau nruj 100% helium leak test, lav kev xau{1}} nruj kev ua haujlwm.
